Description |
722 pages : illustrations ; 26 cm. |
ISBN |
9780849328381 hardback |
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0849328381 hardback |
Bibliography |
Includes bibliographical references and index. |
Contents |
1. Nano- and microscience, engineering, and technology -- 2. Nano- and microscale systems, devices, and structures -- 3. Nano- and microsystems: classification and consideration -- 4. Fundamentals of microfabrication and MEMs fabrication technologies -- 5. Devising and synthesis of NEMs and MEMs -- 6. Modeling of micro- and nanoscale electromechanical -- 7. Quantum mechanics and its applications -- 8. Molecular and carbon nanoelectronics -- 9. Control of MEMs and NEMs -- 10. Examples in synthesis, analysis, design and fabrication of MEMs. |
Summary |
Significantly revised to reflect both fundamental and technological aspects, this second edition introduces the concepts, methods, techniques, and technologies needed to solve a wide variety of problems related to high-performance nano- and microsystems. The book is written in a textbook style and now includes homework problems, examples, and reference lists. It is designed to satisfy the growing demands of undergraduate and graduate students, researchers, and professionals in the fields of nano- and microengineering, and to enable everyone to contribute to the nanotechnology revolution. |
Series |
Nano- and microscience, engineering, technology, and medicine series ; 8.
|
Library Class |
Engineering KR120
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Subject |
Microelectromechanical systems.
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Nanotechnology.
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