Thesis
Title Improvements to the alignment process in electron-beam lithography / by K.E. Docherty.
Author Docherty, K. E.
Published 2009.

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Description xxi, 226 p. : ill. ; 30 cm.
Note Ph.D. thesis submitted to the Faculty of Engineering, Department of Electronics and Electrical Engineering, University of Glasgow, 2009.
Thesis Thesis (Ph.D.) -- University of Glasgow, 2009.
Bibliography Includes bibliographical references (p. 217-226)
Note Electronic version also available via Enlighten: Theses, http://theses.gla.ac.uk
Library Class Thesis TA0957
Subject Electron beams -- Theses PhD.

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