Thesis
Title Techniques and applications of very high resolution electron-beam lithography / by William Stuart Mackie.
Author Mackie, William Stuart.
Published 1984.


Status Loan Type Location Shelf-mark
 Reference Only  Not for loan  Level 12 Spec Coll  Thesis 7154  

More Details

Description 111 p. : ill. ; 30 cm.
Note Ph.D. thesis submitted to the Faculty of Engineering, University of Glasgow, 1984.
Thesis Thesis (Ph.D.) -- University of Glasgow, 1984.
Bibliography Includes bibliographical references.
Note Electronic version also available via Enlighten: Theses, http://theses.gla.ac.uk
Library Class Thesis 7154
Subject Electron beams -- Theses PhD.

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